VARIAN Products

3 keV Raster Ion Bombardment Gun and Control

  • Outstanding Low Voltage Performance
  • High Sputtering Rates 200 a/min
  • Beam Diameter 2.5 mm
  • Dual Filament Line Off Sight
  • Automatic Degass Function
  • 2.75" O.D. Mounting
 3keV Raster Ion Bombardment Gun
Incl.
Model 981-2043 Gun w/Dual Filament
Model 981-2046 Controller, 115V/230V
Cable Kit, Gasket, Manual

EUR 6 630

User Guide - Open or Download

Accessories & Spares

Part NumberDescriptionEUR
981-2040Ion Gun Shipping Container90
981-2046Power Supply, 115V/230V3 660
981-2043Ion Gun, 6" Length2 980
981-2043-EXTIon Gun, Custom Insertion Length4 180
981-2046-BVUpgrade with Beam Voltage Indicator380
00.660.1156m Connection Cable540
981-2044Replacement Filament, incl. Two Pairs280
981-2044-EXCRefurbished Filament, One Pair
(Exchange Service - Yours has to be returned)		80
81.400.344Manual, Gun40
81.400.345Manual, Controller40
81.400.346Set of Schematics, Layouts, Parts Lists40
00.652.396Beam Path Grid (Gridded Washer)70
00.652.396-EXCRefurbished Beam Path Grid (Gridded Washer)
(Exchange Service - Yours has to be returned)		30
00.648.324Extractor Grid Assembly210
00.648.324-EXCExtractor Grid Assembly
(Exchange Service - Yours has to be returned)		100
53.611.003Remote, Male Cable Connector20
Loaner, Power Supply Rent per week80
RMA# xxxxRepair of Power Supply, Flat Rate360
RMA# xxxxRepair of Ion Gun, Flat Rate510
RMA# xxxxRepair of Connection Cable220

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